SPUTTERING OF INSULATORS DUE TO ELECTRONIC EXCITATION, BY FAST IONS AND ELECTRONS

被引：41

作者：

JOHNSON, RE ^{[1
]}

BROWN, WL ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90840-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：469 / 476

页数：8

共 41 条

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