VERIFICATION OF MOMENTUM-TRANSFER AS THE DOMINANT DENSIFYING MECHANISM IN ION-ASSISTED DEPOSITION

被引：52

作者：

TARGOVE, JD ^{[1
]}

MACLEOD, HA ^{[1
]}

机构：

[1] UNIV ARIZONA, CTR OPT SCI, TUCSON, AZ 85721 USA

来源：

APPLIED OPTICS | 1988年 / 27卷 / 18期

关键词：

D O I：

10.1364/AO.27.003779

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3779 / 3781

页数：3

共 10 条

[1] POROSITY OF MGF2 FILMS - EVALUATION BASED ON CHANGES IN REFRACTIVE INDEX DUE TO ADSORPTION OF VAPORS [J].

KINOSITA, K ;

NISHIBORI, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04) :730-+

[2] STRUCTURE-RELATED OPTICAL-PROPERTIES OF THIN-FILMS [J].

MACLEOD, HA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :418-422

[3] SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM [J].

MANIFACIER, JC ;

GASIOT, J ;

FILLARD, JP .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11) :1002-1004

[4]

MARTIN PJ, 1986, PROGR OPTICS, V23, pCH3

[5]

MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P184, DOI 10.1116/1.573468

[6]

MULLER KH, 1986, J APPL PHYS, V59, P2803, DOI 10.1063/1.336960

[7]

OGURA S., 1975, THESIS NEWCASTLE TYN

[8]

Seitz F., 1956, SOLID STATE PHYS, P307

[9] ION-ASSISTED DEPOSITION OF LANTHANUM FLUORIDE THIN-FILMS [J].

TARGOVE, JD ;

LEHAN, JP ;

LINGG, LJ ;

MACLEOD, HA ;

LEAVITT, JA ;

MCINTYRE, LC .

APPLIED OPTICS, 1987, 26 (17) :3733-3737

[10] EFFECT OF OXYGEN INCORPORATION ON THE STRUCTURE OF ION-BEAM-ASSISTED LAF3 THIN-FILMS [J].

TARGOVE, JD ;

LINGG, LJ ;

LEHAN, JP ;

MACLEOD, HA .

APPLIED OPTICS, 1988, 27 (02) :213-215

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