ANNEALING EFFECT IN SI-DOPED GAAS AND ALGAAS LAYERS GROWN BY MBE

被引:6
作者
ISHIKAWA, T
INATA, T
KONDO, K
SHIBATOMI, A
机构
关键词
SEMICONDUCTING ALUMINUM COMPOUNDS - Growth;
D O I
10.1049/el:19860132
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of annealing on Si-doped GaAs and Al//0//. //3Ga//0//. //7As layers grown by MBE has been studied. In the heavily doped samples, the donor concentration decreased considerably and the broad luminescence characteristic of the SA center reported in bulk n-GaAs appeared. The results suggests evidence that annealing converts some of the Si donors into complexes like the SA center, which does not act as a donor.
引用
收藏
页码:189 / 190
页数:2
相关论文
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