DYNAMIC-MODEL OF MICROSCALE ELECTROMECHANICAL SPATIAL LIGHT-MODULATOR

被引：13

作者：

WETSEL, GC

STROZEWSKI, KJ

机构：

[1] University of Texas at Dallas, Richardson

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 11期

关键词：

D O I：

10.1063/1.352381

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A model based on classical physics describing the nonlinear dynamics of a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steady-state, transient, and harmonic excitation. Comparison of theoretical predictions with the results of experiment for representative devices shows good agreement for small-amplitude deflections, large-amplitude deflections, and unstable transitions.

引用

页码：7120 / 7124

页数：5

共 7 条

[1]

HORNBECK L, 1989, P SPIE, V1150

[2] 128X128 DEFORMABLE MIRROR DEVICE [J].