CHARACTERIZATION OF A MICROMECHANICAL SPATIAL LIGHT-MODULATOR

被引：12

作者：

STROZEWSKI, KJ ^{[1
]}

WANG, CY ^{[1
]}

WETSEL, GC ^{[1
]}

BOYSEL, RM ^{[1
]}

FLORENCE, JM ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,DALLAS,TX 75265

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 11期

关键词：

D O I：

10.1063/1.352382

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The optical-beam-control dynamics of torsion-beam deformable-mirror-device spatial light modulators has been characterized to determine properties important to their operation. The responses of individual picture elements to steady-state, transient, and harmonic excitation were measured using optical-beam-deflection sensors. The steady-state angular deflection is characterized by a stable, reversible regime for applied voltages less than a critical value, V(c) (approximately 16 VDC), an unstable transition to stable maximal deflection at V(c), and hysteresis as the applied voltage is reduced to zero. Representative devices with 50 mum X 50 mum pixels exhibit full-deflection rise times of tens of microseconds and small-deflection resonant frequencies of the order of 10 kHz.

引用

页码：7125 / 7128

页数：4

共 10 条

[1]

COHN RW, 1987, P SOC PHOTO-OPT INS, V825, P178

[2]

COHN RW, 1989, APPL OPTICS, V27, P937

[3] DEFORMABLE MIRROR DEVICE SPATIAL LIGHT MODULATORS AND THEIR APPLICABILITY TO OPTICAL NEURAL NETWORKS [J].