ADSORPTION OF CO ON SI(100)-(2X1) AT ROOM-TEMPERATURE

被引:33
作者
CHAMBERLAIN, JP
CLEMONS, JL
POUNDS, AJ
GILLIS, HP
机构
[1] GEORGIA INST TECHNOL,SCH CHEM & BIOCHEM,ATLANTA,GA 30332
[2] GEORGIA INST TECHNOL,MICROELECTR RES CTR,ATLANTA,GA 30332
基金
美国国家科学基金会;
关键词
D O I
10.1016/0039-6028(94)91292-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Experimental studies using several different surface analytical techniques have shown that carbon monoxide (CO) adsorbs on the Si(100)-(2 x 1) surface at room temperature. X-ray photoelectron spectroscopy (XPS) shows that CO coverage increases with dose size. Ultraviolet photoelectron spectroscopy (UPS) shows molecularly adsorbed CO at the surface. Temperature programmed desorption (TPD) shows first-order kinetics, with activation energy (E(d)) estimated to be 0.48 eV. Low-energy electron diffraction (LEED) shows that adsorption of CO disrupts the Si dimers on the Si(100)-(2 x 1) surface. XPS, UPS and TPD all show that CO has a higher sticking probability when exposed to hot filaments in the UHV chamber during dosing. These results suggest the existence of an activation barrier to adsorption of CO on Si(100)-(2 x 1).
引用
收藏
页码:105 / 117
页数:13
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