DOSE-DEPENDENT MIXING OF ALAS-GAAS SUPERLATTICES BY SI ION-IMPLANTATION

被引:57
作者
VENKATESAN, T
SCHWARZ, SA
HWANG, DM
BHAT, R
KOZA, M
YOON, HW
MEI, P
ARAKAWA, Y
YARIV, A
机构
[1] CALTECH,PASADENA,CA 91125
[2] RUTGERS STATE UNIV,SURFACE MODIFICAT & INTERFACE DYNAM,PISCATAWAY,NJ 08854
[3] BELL COMMUN RES INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.97635
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:701 / 703
页数:3
相关论文
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