ELECTRON-BEAM EFFECTS DUE TO BOMBARDMENT OF CAF2 LAYERS INVESTIGATED BY AUGER-ELECTRON SPECTROSCOPY

被引：2

作者：

BAUNACK, S

LANDGRAF, S

ZEHE, A

机构：

[1] Sektion Physik, Technischen Universität Dresden

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1990年 / 118卷 / 01期

关键词：

D O I：

10.1002/pssa.2211180124

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The interaction of an electron beam with polycrystalline CaF2 layers on Si(100) is studied by AES at ambient temperature. The desorption of fluorine is induced by electron bombardment of the films under URV conditions, leaving behind Ca, which is oxidized to CaO by oxygen‐containing compounds dissolved in the layer. The intensity ratio of Ca(LMV) and Ca(LMM) Auger transitions is used to monitor the degree of oxidation. Decomposition and oxygen uptake are shown to be only dosedependent. In contrast, the behaviour of the Ca(LMV/LMM) ratio depends on current density. As a reason the radiation‐induced diffusion of oxygen is considered. At higher current densities the diffusion is preferred and the formation of CaO is favoured. Copyright © 1990 WILEY‐VCH Verlag GmbH & Co. KGaA

引用

页码：203 / 207

页数：5

共 13 条

[1]

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[2]

BAUNACK S, UNPUB

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