SELF-ALIGNMENT TECHNIQUE FOR FIBER ATTACHMENT TO GUIDED WAVE DEVICES

A multiple-fiber-waveguide alignment technique suitable for single-mode and multimode guided wave devices is discussed. The method uses an overlap between a precision-etched silicon substrate and the top surface of the waveguide substrate to align all but one of the six degrees of freedom automatically. Six arrays, each with twelve single-mode fibers, have been attached, and an average excess loss of 0. 9 dB at lambda equals 1. 3 mu m has been measured. The lowest average excess loss achieved was 0. 4 dB.