A 128X128 FRAME-ADDRESSED DEFORMABLE MIRROR SPATIAL LIGHT-MODULATOR

被引:9
作者
BOYSEL, RM
机构
关键词
DEFORMABLE MIRROR DEVICE (DMD); SPATIAL LIGHT MODULATOR; CCD; PHASE MODULATION; FOLDED SPECTRUM ANALYZER;
D O I
10.1117/12.55946
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe the design, fabrication, and performance of the frame-addressed spatial light modulator (FASLM), a frame-updated 128 x 128 deformable mirror device (DMD) spatial light modulator (SLM). This new DMD consists of a 128 x 128 array of mirror elements addressed by an underlying virtual phase CCD array. Each mirror element consists of four cantilever beam mirrors attached to a central pillar, allowing contiguous placement of the elements. The FASLM operates at higher speed (up to 4-kHz frame rate with 100% pixel addressing) and with a higher optical duty cycle (96%) than previous DMD SLMs.
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页码:1422 / 1427
页数:6
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