A 128X128 FRAME-ADDRESSED DEFORMABLE MIRROR SPATIAL LIGHT-MODULATOR

被引：9

作者：

BOYSEL, RM

机构：

来源：

OPTICAL ENGINEERING | 1991年 / 30卷 / 09期

关键词：

DEFORMABLE MIRROR DEVICE (DMD); SPATIAL LIGHT MODULATOR; CCD; PHASE MODULATION; FOLDED SPECTRUM ANALYZER;

D O I：

10.1117/12.55946

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe the design, fabrication, and performance of the frame-addressed spatial light modulator (FASLM), a frame-updated 128 x 128 deformable mirror device (DMD) spatial light modulator (SLM). This new DMD consists of a 128 x 128 array of mirror elements addressed by an underlying virtual phase CCD array. Each mirror element consists of four cantilever beam mirrors attached to a central pillar, allowing contiguous placement of the elements. The FASLM operates at higher speed (up to 4-kHz frame rate with 100% pixel addressing) and with a higher optical duty cycle (96%) than previous DMD SLMs.

引用

页码：1422 / 1427

页数：6

共 8 条

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