POINT-BY-POINT MATRIX EFFECT CALIBRATION FOR THE QUANTITATIVE-ANALYSIS OF SUPERLATTICES BY SECONDARY ION MASS-SPECTROMETRY

被引：15

作者：

GALUSKA, AA ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT CHEM,ITHACA,NY 14853

来源：

关键词：

D O I：

10.1021/ac00265a020

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：74 / 77

页数：4

共 7 条

[1]

DARIES GJ, 1980, APPL PHYS LETT, V37, P290

GALUSKA, AA ;

MORRISON, GH .

[3] QUANTITATIVE ION-IMPLANTATION - THEORETICAL ASPECTS [J].

GRIES, WH .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02) :97-112

LETA, DP ;

MORRISON, GH .

[5] ION-IMPLANTATION FOR INSITU QUANTITATIVE ION MICROPROBE ANALYSIS [J].

LETA, DP ;

MORRISON, GH .

MAYER, JW ;

ZIEGLER, JF ;

CHANG, LL ;

TSU, R ;

ESAKI, L .

[7]

RUBEROL JM, 1977, 8TH INT C XRAY OPT M, pA133