SPECIES TRANSPORT IN MAGNETIC-FIELD CZOCHRALSKI GROWTH

被引：13

作者：

RILEY, N

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 97卷 / 01期

关键词：

D O I：

10.1016/0022-0248(89)90249-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：76 / 84

页数：9

共 16 条

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ORGAN, AE ;

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[2]

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[3] MELT MOTION IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - ISOTHERMAL MOTION [J].

HJELLMING, LN ;

WALKER, JS .

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[4] LOW OXYGEN-CONTENT CZOCHRALSKI SILICON CRYSTAL-GROWTH [J].

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KOHDA, H ;

HIRATA, H ;

NAKANISHI, H .

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[5]

HURLE DTJ, 1967, CRYST GROWTH, P659

[6]

KIM KM, 1986, J ELECTROCHEM SOC, V133, P586

[7]

LANGLOIS WE, 1985, ANNU REV FLUID MECH, V17, P191

[8]

LEE KJ, 1984, PHYSICOCHEM HYDRODYN, V5, P135

[9] 3-DIMENSIONAL SIMULATIONS OF THE CZOCHRALSKI BULK FLOW IN A STATIONARY TRANSVERSE FIELD AND IN A VERTICAL MAGNETIC-FIELD - EFFECTS ON THE ASYMMETRY OF THE FLOW AND TEMPERATURE DISTRIBUTION IN THE SI MELT [J].

MIHELCIC, M ;

WINGERATH, K .

JOURNAL OF CRYSTAL GROWTH, 1987, 82 (03) :318-326

[10] NUMERICAL SIMULATIONS OF THE CZOCHRALSKI BULK FLOW IN AN AXIAL MAGNETIC-FIELD - EFFECTS ON THE FLOW AND TEMPERATURE OSCILLATIONS IN THE MELT [J].

MIHELCIC, M ;

WINGERATH, K .

JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :163-168

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