MELT MOTION IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - ISOTHERMAL MOTION

被引：90

作者：

HJELLMING, LN

WALKER, JS

机构：

来源：

关键词：

D O I：

10.1017/S0022112086002549

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

引用

页码：237 / 273

页数：37

共 11 条

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[5] KIM KM, 1981, IBM TECH DISCLOSURE, V24, P3376
[6] DIGITAL-SIMULATION OF MAGNETIC CZOCHRALSKI FLOW UNDER VARIOUS LABORATORY CONDITIONS FOR SILICON GROWTH
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LEE, KJ
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[7] LANGLOIS WE, 1982, P BAIL 2 C, P299
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[9] LEE KJ, 1984, PHYSICOCHEM HYDRODYN, V5, P135
[10] LIQUID-METAL FLOW IN A RECTANGULAR DUCT WITH A STRONG NON-UNIFORM MAGNETIC-FIELD
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