A REVIEW OF THE APPLICATION OF ANALYTICAL ELECTRON-MICROSCOPY TO ION-IMPLANTED MATERIALS

被引:8
作者
BENTLEY, J
机构
关键词
D O I
10.1016/0168-583X(86)90002-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:111 / 125
页数:15
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  • [1] ANGELINI P, 1984, ORNLTM9357, P15
  • [2] Appleton B. R., 1984, Ion implantation and beam processing, P189
  • [3] BENTLEY J, 1984, 42ND P ANN M EL MICR, P578
  • [4] BOHN HU, 1985, COMMUNICATION
  • [5] BRICE DK, 1977, SAND7500622 SAND LAB
  • [6] BRICE DK, 1975, ION IMPLANTATION RAN, V1
  • [7] STABILITY OF AMORPHOUS AND CRYSTALLINE PHASES IN AN IRRADIATION ENVIRONMENT
    BRIMHALL, JL
    SIMONEN, EP
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 16 (2-3) : 187 - 192
  • [8] SYMMETRY OF ELECTRON-DIFFRACTION ZONE AXIS PATTERNS
    BUXTON, BF
    EADES, JA
    STEEDS, JW
    RACKHAM, GM
    [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1976, 281 (1301): : 171 - +
  • [9] CARPENTER RW, 1979, 37TH P ANN M EL MICR, P654
  • [10] CARTER CH, 1985, MATER RES SOC S P, V46, P425