A REVIEW OF THE APPLICATION OF ANALYTICAL ELECTRON-MICROSCOPY TO ION-IMPLANTED MATERIALS

被引：8

作者：

BENTLEY, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 16卷 / 2-3期

关键词：

D O I：

10.1016/0168-583X(86)90002-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：111 / 125

页数：15

相关论文

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