SI-MONOLITHIC INTEGRATED PYROELECTRIC INFRARED SENSOR MADE OF PBTIO3 THIN-FILMS

被引：24

作者：

OKUYAMA, M

OHTANI, K

UEDA, T

HAMAKAWA, Y

机构：

来源：

INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 1985年 / 6卷 / 01期

关键词：

D O I：

10.1007/BF01014414

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：71 / 78

页数：8

共 27 条

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HAMAKAWA, Y .

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[6]

HIGUMA Y, 1977, 1977 IEEE IEDM, P294

[7]

IIJIMA K, 1983, 3RD P SENS S, P133

[8] PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING [J].

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[9]

KOJIMA M, 1982, 2ND P SENS S TOK, P241

[10]

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