POLY(STYRENE SULFONE) - SENSITIVE ION-MILLABLE POSITIVE ELECTRON-BEAM RESIST

被引：35

作者：

BOWDEN, MJ ^{[1
]}

THOMPSON, LF ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 12期

关键词：

D O I：

10.1149/1.2401755

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1620 / 1623

页数：4

共 11 条

[1] RADIATION PROTECTION IN COPOLYMERS OF ISOBUTYLENE AND STYRENE [J].

ALEXANDER, P ;

CHARLESBY, A .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1955, 230 (1180) :136-145

[2] THE COPOLYMERIZATION OF STYRENE AND SULPHUR DIOXIDE .1. PROPERTIES AND COMPOSITION OF THE COPOLYMER, AND EVIDENCE FOR THE EXISTENCE OF A STYRENE SULPHUR DIOXIDE COMPLEX [J].

BARB, WG .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1952, 212 (1108) :66-80

[3] ELECTRON-IRRADIATION OF POLY(OLEFIN SULFONES) - APPLICATION TO ELECTRON-BEAM RESISTS [J].

BOWDEN, MJ ;

THOMPSON, LF .

JOURNAL OF APPLIED POLYMER SCIENCE, 1973, 17 (10) :3211-3221

[4]

BROWN JR, 1971, MACROMOLECULES, V5, P109

[5]

CHARLESBY A, 1960, ATOMIC RADIATION POL, P295

[6] STUDIES OF SOLUTION PROPERTIES OF CO-POLYMER .I. STYRENEPOLYSULFONE [J].

ENDO, R ;

MANAGO, T ;

TAKEDA, M .

BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1966, 39 (04) :733-+

[7] THE THERMAL DEGRADATION OF POLYVINYL COMPOUNDS .1. A NEW TYPE OF MOLECULAR STILL [J].

GRASSIE, N ;

MELVILLE, HW .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1949, 199 (1056) :1-13

[8]

HATZAKIS M, 1973, 33 AM CHEM SOC PREPR, P358

[9] RADICAL COPOLYMERIZATION OF SULFUR-DIOXIDE AND STYRENE [J].

MATSUDA, M ;

MIYASHIT.T ;

IINO, M ;

HIRAYAMA, T .

MACROMOLECULES, 1972, 5 (03) :240-&

[10]

RADAKER RB, PRIVATE COMMUNICATIO

← 1 2 →