GENERATION OF FAULTLESS MULTI-PINHOLE MASKS BY MEANS OF SPATIAL-FILTERING

被引:3
作者
DAMMANN, H [1 ]
KLOTZ, E [1 ]
机构
[1] PHILIPS FORSCH LAB GMBH,2 HAMBURG 54,FED REP GER
关键词
D O I
10.1016/0030-4018(75)90097-8
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:268 / 272
页数:5
相关论文
共 3 条
[1]  
Dammann H., 1971, Optics Communications, V3, P251, DOI 10.1016/0030-4018(71)90016-2
[2]  
Kock M., 1973, Optics Communications, V7, P260, DOI 10.1016/0030-4018(73)90024-2
[3]   INSPECTION OF INTEGRATED CIRCUIT PHOTOMASKS WITH INTENSITY SPATIAL FILTERS [J].
WATKINS, LS .
PROCEEDINGS OF THE IEEE, 1969, 57 (09) :1634-&