TEMPERATURE SELECTIVE DEPOSITION OF PARYLENE-C

被引：8

作者：

CHARLSON, EM

CHARLSON, EJ

SABETI, R

机构：

[1] Department of Electrical and Computer Engineering, University of Missouri-Columbia, Columbia

来源：

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING | 1992年 / 39卷 / 02期

关键词：

D O I：

10.1109/10.121652

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A new method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thickness are compared.

引用

收藏

页码：202 / 206

页数：5

相关论文

共 18 条

[1] SOLID-STATE ELECTRODES FOR MULTICHANNEL MULTIPLEXED INTRACORTICAL NEURONAL RECORDING [J].

BEMENT, SL ;

WISE, KD ;

ANDERSON, DJ ;

NAJAFI, K ;

DRAKE, KL .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1986, 33 (02) :230-241

[2]

Charlson E. J., 1984, J APPL POLYM SCI APP, V38, P137

[3] SENSORS FOR USE WITH FUNCTIONAL NEUROMUSCULAR STIMULATION [J].

CRAGO, PE ;

CHIZECK, HJ ;

NEUMAN, MR ;

HAMBRECHT, FT .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1986, 33 (02) :256-268

[4]

DILKS A, 1983, PHYSICOCHEMICAL ASPE, V2, P749

[5] POLYMERIZATION OF PARA-XYLYLENE DERIVATIVES (PARYLENE POLYMERIZATION) .2. HEAT-EFFECTS DURING DEPOSITION OF PARYLENE-C AT DIFFERENT TEMPERATURES [J].

GAZICKI, M ;

SURENDRAN, G ;

JAMES, W ;

YASUDA, H .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1985, 23 (08) :2255-2277

[6]

HAHN AH, 1981, 18TH P ROCK MOUNT BI, P109

[7] APPLIED NEURAL CONTROL IN THE 1990S [J].

HEETDERKS, WJ ;

HAMBRECHT, FT .

PROCEEDINGS OF THE IEEE, 1988, 76 (09) :1115-1121

[8] POLYMERIZATION OF PARA-XYLYLENE DERIVATIVES (PARYLENE POLYMERIZATION) .1. DEPOSITION KINETICS FOR PARYLENE-N AND PARYLENE-C [J].

KRAMER, P ;

SHARMA, AK ;

HENNECKE, EE ;

YASUDA, H .

JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1984, 22 (02) :475-491

[9] DEFINITION OF THE GEOMETRIC AREA OF A MICROELECTRODE TIP BY PLASMA-ETCHING OF PARYLENE [J].

LEVY, BP ;

CAMPBELL, SL ;

ROSE, TL .

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1986, 33 (11) :1046-1049

[10] TANTALUM ON SAPPHIRE MICRO-ELECTRODE ARRAY [J].

MAY, GA ;

SHAMMA, SA ;

WHITE, RL .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1932-1939