TEMPERATURE SELECTIVE DEPOSITION OF PARYLENE-C

被引：8

作者：

CHARLSON, EM

CHARLSON, EJ

SABETI, R

机构：

[1] Department of Electrical and Computer Engineering, University of Missouri-Columbia, Columbia

来源：

IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING | 1992年 / 39卷 / 02期

关键词：

D O I：

10.1109/10.121652

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A new method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thickness are compared.

引用

页码：202 / 206

页数：5

共 18 条

[11]

MORTIMER JT, 1983, IEEE ENG MED BIOL, V2, P12

[12] AN IMPLANTABLE MULTIELECTRODE ARRAY WITH ON-CHIP SIGNAL-PROCESSING [J].