VAPOR-PHASE EPITAXY DYNAMICS

被引:5
作者
FROLOV, IA
TOMCHINSKII, AM
机构
关键词
D O I
10.1016/0022-0248(85)90379-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:699 / 704
页数:6
相关论文
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