INTRODUCTION TO THE ESEM INSTRUMENT

被引：187

作者：

DANILATOS, GD

机构：

[1] Esem Research Laboratory, North Bondi, New South Wales

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 1993年 / 25卷 / 5-6期

关键词：

ENVIRONMENTAL SEM; SCANNING ELECTRON MICROSCOPE; GASEOUS DETECTION; DIFFERENTIAL PUMPING;

D O I：

10.1002/jemt.1070250503

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

An outline is presented of the first commercial environmental scanning electron microscope (ESEM). A concise description of this instrument and its operation, from a user's perspective, is given. More specifically, the description includes the electron optics, pressure stages and control, detection modes, resolution, and ancillary equipment. (C) 1993 Wiley-Liss, Inc.

引用

页码：354 / 361

页数：8