THE THICK-FILM ROUTE TO SELECTIVE GAS SENSORS

被引:26
作者
MENIL, F
LUCAT, C
DEBEDA, H
机构
[1] Laboratoire de Microélectronique-IXL, UA 846 du CNRS, Université de Bordeaux I
关键词
GAS SENSORS; THICK-FILM SENSORS;
D O I
10.1016/0925-4005(95)85094-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Some new routes to gas selectivity are investigated with the help of thick-film screen-printing technology. Selectivity to phosphine is achieved by the gaseous pretreatment of a thick layer of semiconductive iron oxide. Selectivity to methane uses the differential catalytic activity of palladium and platinum versus the combustion of methane in various thick-film sensors: semiconductor oxides, pellistors and combinations of both devices. Finally, a short proposal is presented for improving solid-electrolyte screen-printed sensors, which in contrast to previous ones are basically selective, but normally have an unreliable sensitivity.
引用
收藏
页码:415 / 420
页数:6
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