ATOMIC PROCESSES IN CRYSTAL-GROWTH

被引:367
作者
VENABLES, JA [1 ]
机构
[1] ARIZONA STATE UNIV, DEPT PHYS & ASTRON, TEMPE, AZ 85287 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/0039-6028(94)90698-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The thermodynamic and kinetic processes which are involved in the early stages of crystal growth are discussed, with especial reference to vapor deposition of thin films. The atomic processes taking place during deposition are described in terms of rate and diffusion equations; the concept of ''competitive capture'' is outlined, where adatoms are forced to choose between competing sinks. The use of microscopy and surface physics techniques to study nucleation in films is emphasised. Examples of island (Volmer-Weber), layer (Frank-van der Merwe) and layer plus island (Stranski-Krastanov) growth in metal/insulator, metal/semiconductor and semiconductor/semiconductor deposition systems are given.
引用
收藏
页码:798 / 817
页数:20
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