SURFACE PROPERTY CHARACTERIZATION OF PLASMA-POLYMERIZED TETRAFLUOROETHYLENE DEPOSITS

被引：10

作者：

WASHO, BD ^{[1
]}

机构：

[1] IBM CORP,POUGHKEEPSIE,NY 12602

来源：

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1976年 / A 10卷 / 03期

关键词：

D O I：

10.1080/00222337608061199

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：559 / 566

页数：8

共 7 条

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OWENS, PA ;

CRAWSHAW, A .

[2]

ELLIOTT GEP, 1964, RECENT PROGRESS SURF, V2, P111

[3]

MCTAGGART FK, 1967, PLASMA CHEMISTRY ELE

[4] PLASMA SYNTHESIS OF FLUOROCARBON FILMS [J].

MILLARD, MM ;

WINDLE, JJ ;

PAVLATH, AE .

[5] PLASMA CLEANING OF METAL-SURFACES [J].

OKANE, DF ;

MITTAL, KL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (03) :567-569

[6]

SCHONHORN H, 1966, J POLYM SCI B, V4, P203

[7]

ZISMAN WA, 1965, REC CHEM PROG, V26, P13