PLASMA CLEANING OF METAL-SURFACES

被引：80

作者：

OKANE, DF ^{[1
]}

MITTAL, KL ^{[1
]}

机构：

[1] IBM CORP,GEN PROD DIV,SAN JOSE,CA 95114

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 03期

关键词：

Compendex;

D O I：

10.1116/1.1318069

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

METAL CLEANING

引用

页码：567 / 569

页数：3

共 9 条

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