AN ALTERNATIVE APPROACH TO THE CALCULATION OF 4-PROBE RESISTANCES ON NONUNIFORM STRUCTURES

被引:23
作者
ALBERS, J [1 ]
BERKOWITZ, HL [1 ]
机构
[1] USA,ELECTR TECHNOL & DEVICES LAB,ELECTR RES & DEV COMMAND,FT MONMOUTH,NJ 07703
关键词
D O I
10.1149/1.2113598
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
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页码:2453 / 2456
页数:4
相关论文
共 6 条
[1]   THE RELATION BETWEEN 2-PROBE AND 4-PROBE RESISTANCES ON NONUNIFORM STRUCTURES [J].
ALBERS, J ;
BERKOWITZ, HL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :392-398
[2]  
ALBERS J, 1980, SOLID STATE ELECTRON, V23, P1187
[3]   ERRORS IN RESISTIVITIES CALCULATED BY MULTILAYER ANALYSIS OF SPREADING RESISTANCES [J].
BERKOWITZ, HL ;
LUX, RA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (09) :1479-1482
[4]   AN EFFICIENT INTEGRATION TECHNIQUE FOR USE IN THE MULTILAYER ANALYSIS OF SPREADING RESISTANCE PROFILES [J].
BERKOWITZ, HL ;
LUX, RA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) :1137-1141
[5]  
SCHEID F, 1968, NUMERICAL ANAL, P109
[6]  
Wheelon A., 1968, TABLES SUMMABLE SERI