STRIP WAVEGUIDES IN LINBO3 FABRICATED BY COMBINED METAL DIFFUSION AND ION-IMPLANTATION

被引：14

作者：

HEIBEI, J ^{[1
]}

VOGES, E ^{[1
]}

机构：

[1] FERNUNIV HAGEN, LEHRSTUHL NACHRICHTENTECH, D-5800 HAGEN, FED REP GER

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1982年 / 18卷 / 05期

关键词：

D O I：

10.1109/JQE.1982.1071615

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：820 / 825

页数：6

共 21 条

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