PIEZOELECTRIC MICROPUMP WITH 3 VALVES WORKING PERISTALTICALLY

被引：251

作者：

SMITS, JG

机构：

[1] Department of Electrical, Computer and Systems Engineering, College of Engineering, Boston University, Boston, MA 02215

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85039-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques is the subject of this report. The micropump can be used to pump liquids or gases to a higher pressure, which can be relieved through a check valve. The body of the pump and the valves are made in silicon and contain piezoelectric material which allows opening and closing of the valves electrically. © 1990.

引用

页码：203 / 206

页数：4