INTERFACE CHARACTERIZATION OF FULLY DEPLETED SOI MOSFETS BY THE DYNAMIC TRANSCONDUCTANCE TECHNIQUE

The dynamic transconductance technique of MOSFET interface characterization is adapted to fully depleted SOI transistors and is used to measure the interface-state density energy profiles in several SIMOX transistors. By making measurements first with the current flowing through the channel under measurement and then through the opposite channel, much of the energy gap (from accumulation to well into weak inversion) can be probed. Remarkably high sensitivity is achieved by utilizing the imaginary part of the dynamic transconductance. Measured interface trap densities were in the region of approximately 10(10)-10(11)eV-1.cm-2.