DETERMINATION OF SURFACE-ROUGHNESS AND OPTICAL-CONSTANTS OF INHOMOGENEOUS AMORPHOUS-SILICON FILMS

被引：728

作者：

SWANEPOEL, R

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1984年 / 17卷 / 10期

关键词：

D O I：

10.1088/0022-3735/17/10/023

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：896 / 903

页数：8

共 8 条

[1]

CISNEROS JI, 1983, THIN SOLID FILMS, V100, P155, DOI 10.1016/0040-6090(83)90471-6

[2]

Clark A. H., 1980, Polycrystalline and amorphous thin films and devices, P135

[3] OPTICAL-CONSTANTS OF RF SPUTTERED HYDROGENATED AMORPHOUS SI [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1979, 20 (02) :716-728

[4]

HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193

MARTIN, PJ ;

NETTERFIELD, RP ;

SAINTY, WG ;

MCKENZIE, DR .

SWANEPOEL, R .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1983, 16 (12) :1214-1222

[7]

SWANEPOEL R, 1984, THIN SOLID FILMS

[8] OPTICAL-ABSORPTION IN D C SPUTTERED INAS FILMS [J].

SZCZYRBOWSKI, J ;

CZAPLA, A .