OPTICAL-PROPERTIES OF THIN AMORPHOUS-SILICON AND AMORPHOUS HYDROGENATED SILICON FILMS PRODUCED BY ION-BEAM TECHNIQUES

被引：22

作者：

MARTIN, PJ ^{[1
]}

NETTERFIELD, RP ^{[1
]}

SAINTY, WG ^{[1
]}

MCKENZIE, DR ^{[1
]}

机构：

[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA

来源：

THIN SOLID FILMS | 1983年 / 100卷 / 02期

关键词：

D O I：

10.1016/0040-6090(83)90469-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：141 / 147

页数：7

共 24 条

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