STUDY OF NANOSCALE MAGNETIC-STRUCTURES FABRICATED USING ELECTRON-BEAM LITHOGRAPHY AND QUANTUM MAGNETIC DISK

被引：107

作者：

CHOU, SY

WEI, M

KRAUSS, PR

FISCHER, PB

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587642

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：3695 / 3698

页数：4

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