ELECTRON-BEAM CUTTING IN AMORPHOUS ALUMINA SHEETS

被引：24

作者：

MOCHEL, ME

EADES, JA

METZGER, M

MEYER, JI

MOCHEL, JM

机构：

[1] UNIV ILLINOIS,DEPT PHYS,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 05期

关键词：

D O I：

10.1063/1.94812

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：502 / 504

页数：3

共 8 条

[1]

BOURRET A, 1983, J PHYS LETT-PARIS, V44, pL33, DOI 10.1051/jphyslet:0198300440103300

[2] INVESTIGATION OF ALUMINIUM ALUMINIUM OXIDE REVERSIBLE TRANSFORMATION AS OBSERVED BY HOT STAGE ELECTRON-MICROSCOPY [J].

GROVE, CA ;

ANSELL, GS ;

JUDD, G .

JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) :393-&

[3]

HOWARD RE, 1982, VLSI ELECTRONICS MIC, V5, pCH4

[4] INSITU VAPORIZATION OF VERY LOW-MOLECULAR WEIGHT RESISTS USING 1-2 NM DIAMETER ELECTRON-BEAMS [J].

ISAACSON, M ;

MURRAY, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1117-1120

[5] ELECTRON-BEAM WRITING ON A 20-A SCALE IN METAL BETA-ALUMINAS [J].

MOCHEL, ME ;

HUMPHREYS, CJ ;

EADES, JA ;

MOCHEL, JM ;

PETFORD, AM .

APPLIED PHYSICS LETTERS, 1983, 42 (04) :392-394

[6] CRYSTALLIZATION OF ANODIC AL2O3 [J].

NEUFELD, P ;

AKBAR, M ;

ASHDOWN, R ;

NAGPAUL, NK .

ELECTROCHIMICA ACTA, 1972, 17 (09) :1543-&

[7]

YOUNG L, 1961, ANODIC OXIDE FILMS, pCH17

[8] EFFECT OF CHLORIDE ON GROWTH OF AN ANODIC FILM [J].

ZAHAVI, J ;

METZGER, M .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (02) :268-279

← 1 →