INSITU VAPORIZATION OF VERY LOW-MOLECULAR WEIGHT RESISTS USING 1-2 NM DIAMETER ELECTRON-BEAMS

[1] SUB-20-NM-WIDE METAL LINES BY ELECTRON-BEAM EXPOSURE OF THIN POLY(METHYL METHACRYLATE) FILMS AND LIFTOFF [J]. APPLIED PHYSICS LETTERS, 1981, 38 (06) : 436 - 439

[2] Broers A. N., 1980, International Electron Devices Meeting. Technical Digest, P2

[3] ELECTRON-BEAM FABRICATION OF 80-A METAL STRUCTURES [J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 596 - 598

[4] BROERS AN, 1978, ELECT MICROSC, V3, P343

[5] RADIATION-DAMAGE IN ELECTRON-MICROSCOPY OF INORGANIC SOLIDS [J]. ULTRAMICROSCOPY, 1978, 3 (04) : 381 - 386

[6] HREN J, 1979, ANAL ELECTRON MICROS, P481

[7] ELECTRON-BEAM EXCITATION AND DAMAGE OF BIOLOGICAL MOLECULES - ITS IMPLICATIONS FOR SPECIMEN DAMAGE IN ELECTRON MICROSCOPY [J]. RADIATION RESEARCH, 1973, 55 (02) : 205 - 224

[8] ELECTRON-BEAM INDUCED DAMAGE OF ORGANIC-SOLIDS - IMPLICATIONS FOR ANALYTICAL ELECTRON-MICROSCOPY [J]. ULTRAMICROSCOPY, 1979, 4 (02) : 193 - 199

[9] Isaacson M., 1974, Scanning Electron Microscopy 1974, P19

[10] ISAACSON M, 1979, 37TH P ANN EMSA M SA, P372

[1] SUB-20-NM-WIDE METAL LINES BY ELECTRON-BEAM EXPOSURE OF THIN POLY(METHYL METHACRYLATE) FILMS AND LIFTOFF [J]. APPLIED PHYSICS LETTERS, 1981, 38 (06) : 436 - 439

[2] Broers A. N., 1980, International Electron Devices Meeting. Technical Digest, P2

[3] ELECTRON-BEAM FABRICATION OF 80-A METAL STRUCTURES [J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 596 - 598

[4] BROERS AN, 1978, ELECT MICROSC, V3, P343

[5] RADIATION-DAMAGE IN ELECTRON-MICROSCOPY OF INORGANIC SOLIDS [J]. ULTRAMICROSCOPY, 1978, 3 (04) : 381 - 386

[6] HREN J, 1979, ANAL ELECTRON MICROS, P481

[7] ELECTRON-BEAM EXCITATION AND DAMAGE OF BIOLOGICAL MOLECULES - ITS IMPLICATIONS FOR SPECIMEN DAMAGE IN ELECTRON MICROSCOPY [J]. RADIATION RESEARCH, 1973, 55 (02) : 205 - 224

[8] ELECTRON-BEAM INDUCED DAMAGE OF ORGANIC-SOLIDS - IMPLICATIONS FOR ANALYTICAL ELECTRON-MICROSCOPY [J]. ULTRAMICROSCOPY, 1979, 4 (02) : 193 - 199

[9] Isaacson M., 1974, Scanning Electron Microscopy 1974, P19

[10] ISAACSON M, 1979, 37TH P ANN EMSA M SA, P372