THE ROLE OF INTERFACIAL REACTIONS IN PT/CDTE CONTACT FORMATION

被引:14
作者
CORDES, H [1 ]
SCHMIDFETZER, R [1 ]
机构
[1] TECH UNIV CLAUSTHAL,AG ELEKTRON MAT,D-38678 CLAUSTHAL ZELLERF,GERMANY
关键词
D O I
10.1088/0268-1242/9/11/009
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The reactions at the interface between CdTe and the contact metal platinum have been studied using various approaches including theoretical and experimental ternary phase diagram determination, bulk and thin film diffusion couples and electrical characterization of elemental and compound contacts on p- and n-Cd0.95Zn0.05Te (CZT). At the interface of Pt/CdTe diffusion couples a non-planar reaction layer of the intermetallics PtCd and PtTe is formed. This is consistent with the studied ternary phase diagram. Additional compounds which are stable in direct contact to CdTe can also be identified using these data. The contact barrier heights of pure Pt and of alloys with Cd or Te on CZT substrates and their variation after various annealing procedures were determined both on etched (Te-rich) and on virtually stoichiometric CZT surfaces. All the Pt-based contacts on the etched CZT surface showed a similar behaviour, determined by the Te excess and the ensuing formation of PtTe in direct contact to CZT. In contrast to that, a wide range of electrical properties can be achieved on the stoichiometric surface by deposition of Pt with or without additional Cd or Te interlayers due to the variety of phases forming in direct contact to CZT after deposition and annealing.
引用
收藏
页码:2085 / 2096
页数:12
相关论文
共 31 条
[1]   THE STRUCTURES OF THE GAMMA-PHASES IN THE PD-CD AND PT-CD SYSTEMS [J].
ARNBERG, L .
ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1980, 36 (MAR) :527-532
[2]   COMPOSITION OF SOME PLATINUM MIXTURES WITH SN, SB, TE [J].
BHAN, S ;
GODECKE, T ;
SCHUBERT, K .
JOURNAL OF THE LESS-COMMON METALS, 1969, 19 (02) :121-&
[3]   REACTIVE INTER-DIFFUSION AND ELECTRONIC BARRIERS AT METAL-CDS AND METAL-CDSE INTERFACES - CONTROL OF SCHOTTKY-BARRIER HEIGHT USING REACTIVE INTERLAYERS [J].
BRUCKER, CF ;
BRILLSON, LJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :617-622
[4]  
CORDES H, 1994, THESIS TU CLAUSTHAL
[5]  
CORDES J, 1992, DVS BERICHTE, V141, P211
[6]   OHMIC CONTACTS FOR GAAS DEVICES [J].
COX, RH ;
STRACK, H .
SOLID-STATE ELECTRONICS, 1967, 10 (12) :1213-+
[7]  
de Nobel D., 1959, PHILIPS RES REPORTS, V14, P361
[8]   SCHOTTKY BARRIERS AND INTERFACE REACTIONS ON CHEMICALLY ETCHED N-CDTE SINGLE-CRYSTALS [J].
DHARMADASA, IM ;
MCLEAN, AB ;
PATTERSON, MH ;
WILLIAMS, RH .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1987, 2 (07) :404-412
[9]   SCHOTTKY BARRIERS - AN EFFECTIVE WORK FUNCTION MODEL [J].
FREEOUF, JL ;
WOODALL, JM .
APPLIED PHYSICS LETTERS, 1981, 39 (09) :727-729
[10]   OVERLAYER-CATION REACTION AT THE PT/HG1-XCDXTE INTERFACE [J].
FRIEDMAN, DJ ;
CAREY, GP ;
LINDAU, I ;
SPICER, WE .
PHYSICAL REVIEW B, 1987, 35 (03) :1188-1195