DENSITY OF STATES STUDY OF MAGNETRON-SPUTTERED A-SI-H BY CAPACITANCE AND SPACE-CHARGE-LIMITED CURRENT (SCLC) MEASUREMENTS

被引:5
作者
KRIEGER, G
GANGOPADHYAY, S
RUBEL, H
SCHRODER, B
GEIGER, J
机构
关键词
D O I
10.1016/0022-3093(85)90667-2
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:327 / 330
页数:4
相关论文
共 10 条
[1]   ELECTRON-SPIN RESONANCE OF DOPED GLOW-DISCHARGE AMORPHOUS-SILICON [J].
DERSCH, H ;
STUKE, J ;
BEICHLER, J .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1981, 105 (01) :265-274
[2]   DENSITY OF STATES STUDY OF SPUTTERED AND EVAPORATED A-SI-H BY SPACE-CHARGE-LIMITED CURRENT TECHNIQUE [J].
GANGOPADHYAY, S ;
ISELBORN, S ;
RUBEL, H ;
SCHRODER, B ;
GEIGER, J .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1985, 51 (03) :L33-L38
[3]   FREQUENCY AND TEMPERATURE-DEPENDENCE OF THE SPACE-CHARGE CAPACITANCE IN A-SI-H FILMS [J].
GLADE, A ;
FUHS, W ;
MELL, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :269-272
[4]   PREPARATION OF LOW DEFECT GRADE A-SI-H FILMS BY RF MAGNETRON SPUTTERING TECHNIQUE [J].
MULLER, W ;
PIRRUNG, J ;
SCHRODER, B ;
GEIGER, J .
SOLAR ENERGY MATERIALS, 1984, 10 (02) :171-186
[5]  
NESPUREK S, 1980, J APPL PHYS, V51, P2098, DOI 10.1063/1.327880
[6]  
RUBEL H, 1985, POLY MICROCRYSTALLIN, P463
[7]  
STUTZMANN M, 1985, POLY MICROCRYSTALLIN, P671
[8]   EFFECT OF HYDROGEN ON THE DENSITY OF GAP STATES IN REACTIVELY SPUTTERED AMORPHOUS-SILICON [J].
TIEDJE, T ;
MOUSTAKAS, TD ;
CEBULKA, JM .
PHYSICAL REVIEW B, 1981, 23 (10) :5634-5637
[10]   AN IMPROVED FIELD-EFFECT ANALYSIS FOR THE DETERMINATION OF THE PSEUDOGAP-STATE DENSITY IN AMORPHOUS-SEMICONDUCTORS [J].
WEISFIELD, RL ;
ANDERSON, DA .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 44 (01) :83-93