PREPARATION OF LOW DEFECT GRADE A-SI-H FILMS BY RF MAGNETRON SPUTTERING TECHNIQUE

被引：16

作者：

MULLER, W

PIRRUNG, J

SCHRODER, B

GEIGER, J

机构：

来源：

SOLAR ENERGY MATERIALS | 1984年 / 10卷 / 02期

关键词：

D O I：

10.1016/0165-1633(84)90059-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：171 / 186

页数：16

共 44 条

[1] TRANSPORT-PROPERTIES OF A-SI - H ALLOYS PREPARED BY RF SPUTTERING-I [J].

ANDERSON, DA ;

PAUL, W .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 44 (02) :187-213

[2]

ANDERSON DA, 1982, PHILOS MAG B, V45, P1, DOI 10.1080/01418618208243899

[3] IMPORTANCE OF ARGON PRESSURE IN THE PREPARATION OF RF-SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS [J].

ANDERSON, DA ;

MODDEL, G ;

PAESLER, MA ;

PAUL, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03) :906-912

[4] ASSESSMENT OF THE SUITABILITY OF RF SPUTTERED AMORPHOUS HYDROGENATED SI AS A POTENTIAL SOLAR-CELL MATERIAL [J].

ANDERSON, DA ;

MODDEL, G ;

PAUL, W .

JOURNAL OF ELECTRONIC MATERIALS, 1980, 9 (01) :141-152

[5] PHOTOCONDUCTIVITY AND RECOMBINATION IN DOPED AMORPHOUS SILICON [J].

ANDERSON, DA ;

SPEAR, WE .

PHILOSOPHICAL MAGAZINE, 1977, 36 (03) :695-712

[6] CHARACTERIZATION OF HIGH GAP STATE DENSITIES IN HEAVILY HYDROGENATED A-SI [J].

ANDERSON, DA ;

MODDEL, G ;

PAUL, W .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :345-350

[7] HYDROGEN EVOLUTION FROM PLASMA-DEPOSITED AMORPHOUS-SILICON FILMS [J].

BEYER, W ;

WAGNER, H .

JOURNAL DE PHYSIQUE, 1981, 42 (NC4) :783-786

[8] THE ROLE OF HYDROGEN IN A-SI-H - RESULTS OF EVOLUTION AND ANNEALING STUDIES [J].

BEYER, W ;

WAGNER, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :161-168

[9]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[10] ANALYSIS OF PHOTOCONDUCTIVITY APPLIED TO CADMIUM-SULFIDE-TYPE PHOTOCONDUCTORS [J].

BUBE, RH .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1957, 1 (04) :234-248

← 1 2 3 4 5 →