LARGE AREA SUPERCONDUCTING YBA2CU3O7-X FILMS GROWN BY SINGLE TARGET ION-BEAM SPUTTERING

被引：17

作者：

GAUZZI, A ^{[1
]}

LUCIA, ML ^{[1
]}

KELLETT, BJ ^{[1
]}

JAMES, JH ^{[1
]}

PAVUNA, D ^{[1
]}

机构：

[1] UNIV COMPLUTENSE MADRID,DEPT ELECT & ELECTR,E-28040 MADRID,SPAIN

来源：

PHYSICA C | 1991年 / 182卷 / 1-3期

关键词：

D O I：

10.1016/0921-4534(91)90456-9

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have demonstrated, by using a simple single YBa2Cu3O7-x target ion beam system that, with a sufficiently low power ion beam, preferential sputtering is avoided and high-quality YBa2Cu3O7-x films are deposited over areas larger than almost-equal-to 30 cm2 in a reproducible way. As-deposited films on <100> SrTiO3 are 50-100 nm thick, c-oriented and show the following reproducible electrical properties (within the given variations): T(c0) = 90 +/- 0.5 K, transitions widths less than 1 K, j(c)(77 K) = 1.0-1.2 x 10(6) A cm-2, rho(300 K) = 300 +/- 50-mu-OMEGA-cm, rho(300 K)/rho(100 K) = 2.9 +/- 0.1. The extrapolated residual resistivity rho-res (0 K) is between 0 and 5% of rho(300 K).

引用

页码：57 / 61

页数：5

共 8 条

[1]

Berisch R., 1983, TOP APPL PHYS, V52, P24

[2] PREFERENTIALLY ORIENTED EPITAXIAL Y-BA-CU-O FILMS PREPARED BY THE ION-BEAM SPUTTERING METHOD [J].

FUJITA, J ;

YOSHITAKE, T ;

KAMIJO, A ;

SATOH, T ;

IGARASHI, H .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1292-1295

[3] AES, XPS AND SIMS CHARACTERIZATION OF YBA2CU3O7 SUPERCONDUCTING HIGH-TC THIN-FILMS [J].

GAUZZI, A ;

MATHIEU, HJ ;

JAMES, JH ;

KELLETT, B .

VACUUM, 1990, 41 (4-6) :870-874

[4] CORRELATION BETWEEN THE INSITU GROWTH-CONDITIONS OF YBCO THIN-FILMS AND THE THERMODYNAMIC STABILITY-CRITERIA [J].

HAMMOND, RH ;

BORMANN, R .

PHYSICA C, 1989, 162 :703-704

[5] INSITU SUPERCONDUCTING YBA2CU3O7 THIN-FILMS GROWN BY ION-BEAM CO-DEPOSITION [J].

JAMES, JH ;

KELLETT, BJ ;

GAUZZI, A ;

DWIR, B ;

PAVUNA, D .

APPLIED SURFACE SCIENCE, 1989, 43 :393-397

[6]

KAUFMAN HR, 1987, OPERATION BROAD BEAM, P32

[7] ION-BEAM DEPOSITION OF INSITU SUPERCONDUCTING Y-BA-CU-O FILMS [J].

KLEIN, JD ;

YEN, A ;

CLAUSON, SL .

APPLIED PHYSICS LETTERS, 1990, 56 (04) :394-396

[8] MICROSTRUCTURAL CHARACTERIZATION OF YBA2CU3O7-DELTA THIN-FILMS ON SRTIO3 USING 4-AXIS X-RAY-DIFFRACTION [J].

SIZEMORE, J ;

BARTON, R ;

MARSHALL, A ;

BRAVMAN, JC ;

NAITO, M ;

CHAR, K .

IEEE TRANSACTIONS ON MAGNETICS, 1989, 25 (02) :2245-2249

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