OPTIMUM CRYSTALLOGRAPHIC ORIENTATION OF SUBMICROMETER CMOS DEVICES OPERATED AT LOW-TEMPERATURES

被引：3

作者：

AOKI, M ^{[1
]}

YANO, K ^{[1
]}

MASUHARA, T ^{[1
]}

IKEDA, S ^{[1
]}

MEGURO, S ^{[1
]}

机构：

[1] HITACHI LTD, MUSASHI WORKS, KODAIRA, TOKYO 185, JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 01期

关键词：

D O I：

10.1109/T-ED.1987.22884

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：52 / 57

页数：6

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[9]

Meguro S., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P59

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