SAMPLE TILTING MECHANISM AND TRANSFER SYSTEM FOR HIGH-TEMPERATURE THIN-FILM DEPOSITION AND ULTRAHIGH-VACUUM PHOTOELECTRON EMISSION MICROSCOPY

被引:10
作者
GARCIA, A [1 ]
KORDESCH, ME [1 ]
机构
[1] OHIO UNIV,SURFACE SCI PROGRAM,ATHENS,OH 45701
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 02期
关键词
D O I
10.1116/1.578755
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:461 / 463
页数:3
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