A RADIALLY RESOLVED EXPERIMENTAL INVESTIGATION OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN A MICROWAVE-DISCHARGE SUSTAINED BY PROPAGATING SURFACE-WAVES

Radially resolved probe measurements of the electron energy distribution function have been performed in an argon discharge sustained by a propagating surface wave. Good agreement between the electron energy distribution function measured at the axis of the discharge and numerical results from kinetic modelling of a surface-wave-produced plasma is found. The radial variations of the average electron energy and the frequencies of different processes initiated by electron impact are calculated. On the basis of the local electron energy balance, electric field intensity maintenance variations are estimated.