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A RADIALLY RESOLVED EXPERIMENTAL INVESTIGATION OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN A MICROWAVE-DISCHARGE SUSTAINED BY PROPAGATING SURFACE-WAVES

被引：15
作者：
TATAROVA, E
ZAMFIROV, D
机构：
[1] University of Sofia, Sofia
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 07期
关键词：
D O I：
10.1088/0022-3727/28/7/012
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Radially resolved probe measurements of the electron energy distribution function have been performed in an argon discharge sustained by a propagating surface wave. Good agreement between the electron energy distribution function measured at the axis of the discharge and numerical results from kinetic modelling of a surface-wave-produced plasma is found. The radial variations of the average electron energy and the frequencies of different processes initiated by electron impact are calculated. On the basis of the local electron energy balance, electric field intensity maintenance variations are estimated.
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页码：1354 / 1361
页数：8
相关论文
共 35 条
[11]   AXIAL DEPENDENCE OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN MICROWAVE DISCHARGES SUSTAINED BY PROPAGATING SURFACE-WAVES [J].
GROSSE, S ;
SCHLUTER, H ;
TATAROVA, E .
PHYSICA SCRIPTA, 1994, 50 (05) :532-539
[12]   On electron energy distribution function measurements in microwave discharges sustained by propagating surface waves [J].
Grosse, S. ;
Schlueter, H. ;
Tatarova, E. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1994, 3 (04) :545-555
[13]   ELECTRON-ENERGY DISTRIBUTIONS IN OXYGEN MICROWAVE PLASMAS [J].
HEIDENREICH, JE ;
PARASZCZAK, JR ;
MOISAN, M ;
SAUVE, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01) :288-292
[14]   A MICROWAVE INTERFEROMETER FOR MEASUREMENT OF SMALL PHASE ANGLES [J].
HOTSTON, E ;
SEIDL, M .
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1965, 42 (04) :225-&
[15]  
IVANOV YA, 1976, ZH TEKH FIZ+, V46, P1459
[16]  
Ivanov Yu. A., 1976, Fizika Plazmy, V2, P871
[17]   RADIOPHYSICS PLASMA DIAGNOSTIC METHODS APPLIED TO SURFACE-WAVE SUSTAINED MICROWAVE DISCHARGES [J].
IVANOVA, K ;
KOLEVA, I ;
SHIVAROVA, A ;
TATAROVA, E .
PHYSICA SCRIPTA, 1993, 47 (02) :224-229
[18]  
KAGAN YM, 1971, ZTF, V41, P2065
[19]   EXPERIMENTAL-EVIDENCE ON THE NONLOCALITY OF THE ELECTRON-DISTRIBUTION FUNCTION [J].
KORTSHAGEN, U .
PHYSICAL REVIEW E, 1994, 49 (05) :4369-4380
[20]   DETERMINATION OF ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN SURFACE-WAVE PRODUCED PLASMAS .2. MEASUREMENTS [J].
KORTSHAGEN, U ;
SCHLUTER, H .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (09) :1585-1593
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