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STRESS RELATED ANISOTROPY STUDIES IN DC-MAGNETRON SPUTTERED TBCO AND TBFE FILMS

被引：24
作者：
CHENG, SCN
KRYDER, MH
MATHUR, MCA
机构：
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1989年 / 25卷 / 05期
关键词：
D O I：
10.1109/20.42509
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：4018 / 4020
页数：3
相关论文
共 4 条
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[2]   INTERNAL-STRESSES IN TITANIUM, NICKEL, MOLYBDENUM, AND TANTALUM FILMS DEPOSITED BY CYLINDRICAL MAGNETRON SPUTTERING [J].
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[3]   MAGNETOELASTIC CONTRIBUTION TO PERPENDICULAR ANISOTROPY IN AMORPHOUS GD-CO AND GD-FE FILMS [J].
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[4]   INTRINSIC ANISOTROPY OF TB-FE FILMS PREPARED BY MAGNETRON CO SPUTTERING [J].
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HONG, M ;
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ALBISTON, SD .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3897-3899
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