OPTICAL-EMISSIONS IN THE WAVELENGTH REGION 2000-6000 A PRODUCED BY ELECTRON-IMPACT DISSOCIATION OF NF3, CF4 AND SF6

被引:32
作者
BLANKS, KA [1 ]
BECKER, K [1 ]
机构
[1] LEHIGH UNIV,DEPT PHYS,BETHLEHEM,PA 18015
关键词
D O I
10.1088/0022-3700/20/22/024
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:6157 / 6163
页数:7
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