GAINASP/INP SEMICONDUCTOR VERTICAL GRIN-LENS FOR SEMICONDUCTOR OPTICAL-DEVICES

被引:7
作者
ELYUMIN, S
KOMORI, K
ARAI, S
机构
[1] Department of Physical Electronics, Faculty of Engineering, Tokyo Institute of Technology, Meguro-ku, Tokyo 152
关键词
D O I
10.1109/68.285554
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A GaInAsP/InP vertical GRIN-Lens (VGL), which is suitable for monolithic integration with semiconductor laser diodes (LDs) or Semiconductor laser amplifiers (SLAs), was fabricated for the first time. A narrow FWHM of vertical far-field pattern of 6 degree was experimentally obtained with 8 layers of GRIN core region (8 mum thick) and InP cladding layers. An Integration of this VGL with a taper waveguide SLA with the output width of 10 mum was also demonstrated.
引用
收藏
页码:601 / 604
页数:4
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