DOUBLE DOPED LOW ETCH PIT DENSITY INP WITH REDUCED OPTICAL-ABSORPTION

被引：25

作者：

BALLMAN, AA

GLASS, AM

NAHORY, RE

BROWN, H

机构：

来源：

关键词：

D O I：

10.1016/0022-0248(83)90025-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：198 / 202

页数：5

共 9 条

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