DIFFRACTION CHARACTERISTICS OF PHOTORESIST SURFACE-RELIEF GRATINGS

被引：52

作者：

MOHARAM, MG ^{[1
]}

GAYLORD, TK ^{[1
]}

SINCERBOX, GT ^{[1
]}

WERLICH, H ^{[1
]}

YUNG, B ^{[1
]}

机构：

[1] IBM CORP,RES LABS,SAN JOSE,CA 95193

来源：

APPLIED OPTICS | 1984年 / 23卷 / 18期

关键词：

D O I：

10.1364/AO.23.003214

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3214 / 3220

页数：7

共 17 条

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