ELECTRON TRAJECTORY TRACKING ALGORITHMS FOR ANALYZING VOLTAGE CONTRAST SIGNALS IN THE SCANNING ELECTRON-MICROSCOPE

被引:8
作者
CHIM, WK
LOW, TS
CHAN, DSH
PHANG, JCH
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D O I
10.1088/0022-3727/21/1/001
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O59 [应用物理学];
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页码:1 / 9
页数:9
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共 6 条
[1]   HIGH SPATIAL-RESOLUTION SURFACE-POTENTIAL MEASUREMENTS USING SECONDARY ELECTRONS [J].
JANSSEN, AP ;
AKHTER, P ;
HARLAND, CJ ;
VENABLES, JA .
SURFACE SCIENCE, 1980, 93 (2-3) :453-470
[2]   COMPUTATION OF TRAJECTORIES IN VOLTAGE CONTRAST DETECTORS [J].
KURSHEED, A ;
DINNIS, AR .
SCANNING, 1983, 5 (01) :25-31
[3]   LOCAL FIELD EFFECTS ON VOLTAGE CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE [J].
NAKAMAE, K ;
FUJIOKA, H ;
URA, K .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (11) :1939-&
[4]  
Reddy JN., 1985, INTRO FINITE ELEMENT
[5]  
Tuma J.J., 1979, ENG MATH HDB
[6]  
Zienkiewicz O.C., 1977, FINITE ELEMENT METHO