LOCAL FIELD EFFECTS ON VOLTAGE CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE

被引：61

作者：

NAKAMAE, K

FUJIOKA, H

URA, K

机构：

来源：

关键词：

D O I：

10.1088/0022-3727/14/11/003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1939 / &

共 26 条

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[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) : 177 - 183
[9] FUJIOKA H, 1978, SCANNING ELECTRON MI, V1, P755
[10] TECHNIQUE FOR LINEARIZATION OF VOLTAGE CONTRAST IN SCANNING ELECTRON MICROSCOPE
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